Sputtering targets

Sputtering targets:

 Ultra-high purity metal sputtering targets for semiconductors

• High purity Al and Al alloy targets:

1). Products include: Al, Al30ppmSi, Al0.5Si, Al0.75Si, Al0.8Si, Al1Si, Al0.5Cu, AlSiCu etc.

2). Purity of 4N~5N5

3). Different grain orientations for different customer sputtering requirements

4). Ability to work with customers to develop customized long life targets of various types

 

• High purity Ti targets and rings:

1). Products include: 4N5Ti, 5NTi, Ti hypoxides etc.

2). Different grain orientations for different customized sputtering requirements

3). Ability to provide customers with different types of customized long life targets and rings

 

• High purity Cu and coCu alloy targets as well as Cu rings and Cu anodes

Products include: 4NCu, 4N5Cu, 5NCu, 6NCu, CuAl, CuMn alloy targets, CuP, pure Cu and CuP anode materials, rings of pure Cu rings

 

• High purity Ta, Ta alloy targets and Ta rings

1). Products include: various purity of 3N5-5N Ta targets, Ta rings and Ta targets and rings in various lifetimes and sizes

2). Cost savings for customers by offering refurbishment of ta rings

Special metal and alloy targets, products include: high purity W, WTi, WSi, high purity Si, high purity Ni, Ni alloy, high purity Cr and Cr alloy, Co targets, etc.

 

High purity metal sputtering targets and components for liquid crystal flat panel displays

1). G4.5, G5, G5.5, G6, G8.5, G10.5 generation ultra-high purity Al, Cu, Mo and Ti targets

2). Anti-collision plates for PVD machines, crucibles and CFRP liquid crystal glass handling components

 

Precision components for semiconductors

1). For PVD machines Clamp Ring, Collimator

2). CVD, etching for PVD machines face plate, shower head etc.

3). Diamond grinding discs for chemical mechanical grinding machines, Retaining Ring etc.

 

Precious metal and rare metal products

Precious metal includes various high purity metals, alloys and series of compounds products of Gold, Silver, Platinum, Palladium, Ruthenium, Rhodium, Osmium and Iridium, which is widely used in electronics, chemical, catalytic, pharmaceutical, aerospace, jewelry and other industries, and is also an indispensable critical material for modern industry. We have established long-term stable cooperation with both domestic and international famous enterprises. Rare metal product includes various shape memory alloys, titanium and its alloys, and refractory metals such as Zirconium, Hafnium, Tungsten and Molybdenum, which is widely applied in chemical, electronic and mechanic industry and so forth. And other products such as memory rings, titanium and its alloys wires and Zirconium-Hafnium are all in dominant position domestically